CASE STUDIES IN MICROSYSTEMS ENGINEERING

(C-M-02-2001)

MEMS/MST systems have been applied to widely diverse types of products including accelerometers, biosensors, RF filters, optical network components and many others. The lessons learned in these dissimilar endeavours can be beneficial to people undertaking the design of novel devices in any field. This course covers some of the basic structures used in implementing microsystems for the purpose of sharing experience and triggering innovation across disciplines.

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